JPS646066U - - Google Patents
Info
- Publication number
- JPS646066U JPS646066U JP10025987U JP10025987U JPS646066U JP S646066 U JPS646066 U JP S646066U JP 10025987 U JP10025987 U JP 10025987U JP 10025987 U JP10025987 U JP 10025987U JP S646066 U JPS646066 U JP S646066U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate transport
- transport device
- housing
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 5
- 230000032258 transport Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10025987U JPS646066U (en]) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10025987U JPS646066U (en]) | 1987-06-30 | 1987-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646066U true JPS646066U (en]) | 1989-01-13 |
Family
ID=31328180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10025987U Pending JPS646066U (en]) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646066U (en]) |
-
1987
- 1987-06-30 JP JP10025987U patent/JPS646066U/ja active Pending
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